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Title High resolution focused ion beams : FIB and its applications / Jon Orloff, Lynwood W. Swanson, M. Utlaut.

Published New York : Kluwer Academic, 2002.


Location Call No. Status
 UniM ERC  621.38152 HIGH    AVAILABLE
Physical description xi, 303 pages : illustrations ; 26 cm
Bibliography Includes bibliographical references and index.
Contents 1. Field Ionization Sources -- 2. Physics of Liquid Metal Ion Sources -- 3. Ion Optics for LMIS -- 4. Interaction of Ions with Solids -- 5. Practical Focused Ion Beam Optics and Systems -- 6. Applications of Focused Ion Beams -- App. 1. Elements of the Theory of Field Desorption and Ionization -- App. 2. Table of Sputter Yields.
Summary In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject.
Other author Orloff, Jon.
Swanson, Lynwood W., 1934-
Utlaut, Mark William, 1949-
Subject Ion bombardment -- Industrial applications.
ISBN 030647350X
030647350X £94.50