Microelectromechanical systems -- Design. : Electromechanical systems in microtechnology and mechatronics [electronic resource] : electrical, mechanical and acoustic networks, their interactions and applications / Arno Lenk ... [et al.].
Microelectromechanical systems -- Dynamics. : Microsystems dynamics [electronic resource] / Vytautas Ostasevicius, Rolanas Dauksevicius.
Microelectromechanical systems industry -- Periodicals. : Small times [electronic resource] .
Microelectromechanical systems -- Materials -- Textbooks. : Fundamentals of micromechanics of solids / Jianmin Qu, Mohammed Cherkaoui.
Microelectromechanical systems -- Research. : Wireless MEMS networks and applications / edited by Deepak Uttamchandani.
Microelectromechanical systems -- Thermal properties -- Periodicals. : International journal of microscale and nanoscale thermal and fluid transport phenomena [electronic resource] .
Microelectromechanical systems -- Vibration. : Vibrations of elastic systems [electronic resource] : with applications to MEMS and NEMS / Edward B. Magrab.