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Author Hierlemann, A. (Andreas)

Title Integrated chemical microsensor systems in CMOS technology [electronic resource] / A. Hierlemann.

Published Berlin ; New York : Springer, c2005.


Location Call No. Status
Physical description 1 online resource (ix, 229 p.) : ill.
Series Microtechnology and MEMS, 1439-6599
Microtechnology and MEMS. 1439-6599
Bibliography Includes bibliographical references ([p. 193]-217) and index.
Summary "This book, "Integrated Chemical Microsensor Systems in CMOS Technology," provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at scientists and engineers who are interested in gaining an introduction to the field of chemical sensing since all the necessary fundamental knowledge is included. However, as it provides detailed information on all important issues related to the realization of chemical microsensors in CMOS technology, it also addresses experts familiar with the field."--Jacket.
Notes Description based on print version record.
Subject Metal oxide semiconductors, Complementary.
Chemical detectors.
Electronic books.
ISBN 9783540273721
6610306176 (electronic bk.)
3540237828 (cloth)
9783540237822 (cloth)
9786610306176 (electronic bk.)