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Title Semiconductor manufacturing handbook [electronic resource] / Hwaiyu Geng, editor in chief.

Published New York : McGraw-Hill, [2005]


Location Call No. Status
Physical description 1 electronic text : ill.
Series McGraw-Hill's AccessEngineering
McGraw-Hill's AccessEngineering.
Notes Print version c2005.
Bibliography Includes bibliographical references and index.
Pt. 1. Semiconductor fundamentals and basic materials -- pt. 2. Wafer processing -- pt. 3. Final manufacturing -- pt. 4. Nanotechnology, EMS, and FPD -- pt. 5. Gases and chemicals -- pt. 6. Fab yield, operations, and facilities.
Other formats Also issued in print and PDF version.
History notes Contributor biographical information:
Notes Description based on cover image and table of contents, viewed on May 4, 2007.
Other author Geng, Hwaiyu.
Zhou, Lin.
Park, Ilsun.
Ravi, K. V.
Rathore, Hazara S.
Chanda, Kaushik.
Ren, L. P.
Tu, King N.
Coumou, David J.
Biltoft, Peter.
Howard, Charles.
Mack, Chris A.
Graf, Michael.
Zhang, Peng.
Lai, Shouliang.
Solzbacher, Florian.
McInerney, Edward J.
Ramdani, Jamal.
Vaccari, Giovanni.
Ritzdorf, Tom.
Klocke, John.
Dyer, Timothy S.
Machamer, Andrew.
Blair, Donald W.
Arai, Kazuhisa.
Kobayashi, Yoshikazu.
Otani, Hideaki.
Tonnies, Dietrich.
Topper, Michael.
Wang, Zhong L.
Huff, Michael A.
Liu, David N.
Curcie, Wayne D.
Sweeney, Joseph D.
Cox, James C.
Cavicchi, Kristin.
Barsness, Dan.
Gould, Charles K.
Albrecht, David J.
Li, Bo.
Carriker, Wayne.
Haris, Clint.
Peltinov, Ram.
Menaker, Mina.
Scibilia, Bruno.
Altis, Yoan Dupret.
McCafferty, Robert H.
Davis, Brett J.
Trammell, Steven R.
Pavlotsky, Richard V.
Beck, Stephen C.
Gendreau, Michael.
Amick, Hal.
Levit, Larry.
Muller, Chris.
Kochevar, Steven.
Gromala, Jerry.
Pinkowski, Richard E.
IDC Corporation.
Subject Semiconductors -- Design and construction.
Integrated circuits -- Design and construction.
Semiconductors -- Materials.
Integrated circuits -- Reliability.
Plasma engineering.
Process control.
Vacuum techology.
Integrated circuits -- Masks.
Ion implantation.
Rapid thermal process.
Plasma etching.
Physical vapor deposition.
Chemical vapor deposition.
Electrolytic polishing.
Semiconductors -- Polishing.
Semiconductors -- Cleaning.
Grinding and polishing.
Microelectronic packaging.
Electronic packaging.
Microelectromechanical systems.
Flat panel displays.
Waste gases -- Purification.
Hydraulic conveying.
Slurry pipelines.
Chemical plants -- Waste disposal.
Water-supply engineering.
Materials handling.
Six sigma (Quality control standard)
Semiconductor industry -- Environmental aspects.
Semiconductor industry -- Health aspects.
Semiconductor industry -- Safety measures.
Clean rooms -- Design and construction.
Noise control.
Static eliminators.
Airborne infection.
Air -- Pollution.
Sewage -- Purification -- Neutralization.
Electronic books.
Internet resources.
Other title How semiconductor chips are made.
IC design.
Silicon substrates for semiconductor manufacturing.
Copper, low-k dielectrics, and their reliability.
Fundamentals of silicide formation on Si.
Plasma process control.
Vacuum technology.
Ion implantation and rapid thermal processing.
Wet etching.
Plasma etching.
Physical vapor deposition.
Chemical vapor deposition.
ECD fundamentals.
Chemical mechanical polishing.
Wet cleaning.
Inspection, measurement, and test.
Grinding, stress relief, and dicing.
Nanotechnology and nanomanufacturing.
Fundamentals of microelectromechanical systems.
Flat-panel display technology and manufacturing.
Specialty gas and CDA systems.
Waste gas abatement systems.
PFC abatement.
Chemical and slurry handling systems.
Fluid handling components for high-purity liquid chemicals and slurries.
Fundamentals of ultrapure water.
Yield management.
Automated material handling system.
CD metrology and CD-SEM.
Six sigma.
Advanced process control.
Environmental, health, and safety considerations in semiconductor fabrication facilities.
Plan, design, and construction of a fab.
Cleanroom design and construction.
Micro-vibration and noise design.
ESD controls in cleanroom environments.
Airborne molecular contamination.
Particle monitoring in semiconductor manufacturing.
Wastewater neutralization systems.
ISBN 0071468153
0071445595 (print)