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AUTHORS (1-2 of 2)
Mertens, Paul.
1
Book Cover
    E-RESOURCE 2013

Ultra clean processing of semiconductor surfaces XI : selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium / edited by Paul Mertens, Mar

    International Symposium on Ultra Clean Processing of Semiconductor Surfaces (11th : 2012 : Ghent, Belgium)
Durnten-Zurich, Switzerland : Trans Tech Publications Ltd.,        1 online resource (328 pages) : illustrations (black and white). 2013
2
 
    E-RESOURCE 2014

Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / edited by Paul Mertens,

    International Symposium on Ultra Clean Processing of Semiconductor Surfaces (12th : 2014 : Brussels, Belgium)
Pfaffikon, Switzerland : TTP,        1 online resource (331 pages) : illustrations. 2014
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