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Book Cover
Author Okoroanyanwu, Uzodinma, author.

Title Molecular theory of lithography / by Uzodinma Okoroanyanwu.

Published Bellingham, Washington (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2015.


Location Call No. Status
Physical description 1 online resource (xix, 469 pages).
Series SPIE Press monograph ; PM255
SPIE Press monograph ; PM255.
SPIE Digital Library.
Notes "SPIE Digital Library."--Website.
Bibliography Includes bibliographical references and index.
Contents Preface -- Acronyms and abbreviations -- 1. Overview of lithography -- 2. Theory of the lithographic process -- 3. Theory of molecular interactions in lithography -- 4. Theory of photochemical and radiochemical lithographic imaging mechanisms -- 5. Theory of block copolymer self-assembly lithographic imaging mechanisms -- 6. Theory of imprint lithographic imaging mechanisms -- Index.
Restrictions Restricted to subscribers or individual electronic text purchasers.
Summary This book is a unified exposition of the molecular theory that underlies lithographic imaging. It explains with physical-chemical theories the molecular-level interactions involved in lithographic imaging. It also provides the theoretical basis for the main unit operations of the advanced lithographic process, as well as for advanced lithographic imaging mechanisms, including photochemical and radiochemical, imprint, and directed block copolymer self-assembly imaging mechanisms. The book is intended for student and professionals whose knowledge of lithography extends to the chemistry and physics underlying its various forms. A familiarity with chemical kinetics, thermodynamics, statistical mechanics, and quantum mechanics will be helpful, as will be familiarity with elementary concepts in physics such as energy, force, electrostatics, electrodynamics, and optics.
Other formats Also available in print version.
System notes Mode of access: World Wide Web.
System requirements: Adobe Acrobat Reader.
Notes Title from PDF title page (SPIE eBooks Website, viewed 2015-11-13).
Other author Society of Photo-optical Instrumentation Engineers, publisher.
Subject Microlithography -- Industrial applications.
Molecular theory.
Molecular electronics.
Integrated circuits -- Masks.
Electronic books.
ISBN 9781628415520
Standard Number 10.1117/3.2179925