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Book Cover
Author Boyd, Ian W., 1958-

Title Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators / Ian W. Boyd.

Published Berlin ; New York : Springer-Verlag, [1987]


Location Call No. Status
 UniM ERC  621.366 BOYD    AVAILABLE
Physical description viii, 320 pages : 77 illustrations ; 24 cm.
Series Springer series in materials science ; v. 3.
Springer series in materials science ; v. 3.
Notes Includes index.
Bibliography Bibliography: pages 287-313.
Subject Lasers -- Industrial applications.
Thin films.
ISBN 0387179518 (U.S.)
3540179518 (Berlin)