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SUBJECTS (1-24 of 24)
Microelectromechanical systems -- Design and construction.
2
 
    E-RESOURCE c2007

CMOS hotplate chemical microsensors / [electronic resource] / M. Graf ... [et al.].

   
Berlin ; New York : Springer,        1 online resource (xii, 125 p.) : ill. (some col.) c2007
3
 
    PRINTED BOOKS c2012

Fundamentals of microfabrication and nanotechnology / Marc J. Madou.

    Madou, Marc J.
Boca Raton, Fla. ; London : CRC,    3rd ed.    3 v. : ill. (some col.) ; 29 cm. c2012
4
 
    PRINTED BOOKS c2002

Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou.

    Madou, Marc J.
Boca Raton : CRC Press,    2nd ed.    723 p. : col. ill. ; 29 cm. c2002
5
 
    E-RESOURCE 2012

Handbook of wafer bonding / [electronic resource] / edited by Peter Ramm, James Jian-Qiang Lu, and Maaike M.V. Taklo.

   
Weinheim, Germany : Wiley-VCH,        xxxi, 395 p. : col. ill. 2012
6
 
    E-RESOURCE c2012

Inkjet-based micromanufacturing / [electronic resource] / edited by Jan G. Korvink, Patrick J. Smith, and Dong-Youn Shin.

   
Weinheim, Germany : Wiley-VCH,        xvi, 371 p. : ill. (some col.). c2012
7
 
    E-RESOURCE c2011

Introduction to microsystem design / [electronic resource] / Werner Karl Schomburg.

    Schomburg, Werner Karl.
Berlin ; Heidelberg : Springer,        1 online resource (xxi, 319 p.) c2011
8
 
    E-RESOURCE 2015

Introduction to microsystem design / Werner Karl Schomburg.

    Schomburg, Werner Karl, 1955- author.
Heidelberg : Springer,    Second edition.    1 online resource. 2015
9
 
    PRINTED BOOKS c2008

Introduction to microsystem technology : a guide for students / Gerald Gerlach, Wolfram Dötzel ; translated by Dörte Müller.

    Gerlach, Gerald.
Chichester, England : J. Wiley & Sons,        xxiii, 351 p. : ill. ; 26 cm. c2008
10
 
    E-RESOURCE 2015

Materials and failures in MEMS and NEMS / edited by Atul Tiwari and Baldev Raj.

   
Hoboken, New Jersey : John Wiley & Sons ; Salem, Massachusetts : Scrivener Publishing,        1 online resource. 2015
11
 
    E-RESOURCE 2015

Materials and failures in MEMS and NEMS / edited by Atul Tiwari and Baldev Raj.

   
Salem, Massachusetts ; Hoboken, New Jersey : Scrivener Publishing : Wiley,        1 online resource (487 pages) : illustrations, tables. 2015
12
 
    E-RESOURCE 2006

Mechanical design of microresonators : modeling and applications / [electronic resource] / Nicolae Lobontiu.

    Lobontiu, Nicolae.
New York : McGraw-Hill,        1 electronic text (xiii, 342 p.) : ill. 2006
13
 
    PRINTED BOOKS c2001

Mechanical microsensors / M. Elwenspoek, R.J. Wiergerink.

    Elwenspoek, M. (Miko), 1948-
Berlin ; London : Springer,        x, 295 p. : ill. ; 25 cm. c2001
14
 
    PRINTED BOOKS 2006

MEMS : design and fabrication : the MEMS handbook / edited by Mohamed Gad-el-Hak.

   
Boca Raton, FL : CRC/Taylor & Francis Group,    2nd ed.    1 v. (various pagings) : ill. ; 27 cm. 2006
15
 
    E-RESOURCE c2006

MEMS/NEMS handbook techniques and applications / [electronic resource] : edited by Cornelius T. Leondes.

   
New York : Springer,        1 online resource (5 v.) : ill. c2006
16
 
    PRINTED BOOKS 2005

Micro electro mechanical system design / James J. Allen.

    Allen, James J.
Boca Raton, FL : Taylor & Francis,        465 p. : ill. ; 24 cm. 2005
17
 
    E-RESOURCE 1997

Microelectromechanical systems advanced materials and fabrication methods / [electronic resource] : Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineeri

    National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems.
Washington, DC : National Academy Press,        xiv, 61 p. : ill. 1997
18
 
    PRINTED BOOKS 2005

Microfabrication and nanomanufacturing / [edited by] Mark J. Jackson.

   
Boca Raton, FL : Taylor & Francis,        401 p. : ill. ; 26 cm. 2005
19
 
    E-RESOURCE 2008

Microjoining and nanojoining / [electronic resource] / edited by Y. Zhou.

   
Cambridge, England : Woodhead Pub. and Maney Pub., on behalf of the Institute of Materials, Minerals & Mining ; Boca Raton : CRC Press,        1 online resource (xxiv, 810 p.) : ill. 2008
20
 
    E-RESOURCE 2013

Piezoresistor design and applications / Joseph C. Doll, Beth L. Pruitt.

    Doll, Joseph C., author.
New York, NY : Springer,        1 online resource (xi, 245 pages) : illustrations (some color). 2013
21
 
    E-RESOURCE 2015

Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse.

   
Wiesbaden : Wiley-VCH Verlag & Co. KGaA,        1 online resource : illustrations. 2015
22
 
University of Melbourne Author    E-RESOURCE 2015

Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand [and three others].

   
Weinheim, Baden-Württemberg, Germany : Wiley-VCH,        1 online resource (512 pages) : illustrations (some color), graphs. 2015
23
 
    PRINTED BOOKS c2007

Scaling issues and design of MEMS / Salvatore Baglio, Salvatore Castorina, Nicolo Savalli.

    Baglio, S. (Salvatore)
Chichester, England : Wiley,        xiii, 229 p. : ill. ; 24 cm. c2007
24
 
    E-RESOURCE 2018

Thermohydrodynamic programming and constructal design in microsystems / Tao Dong.

    Dong, Tao, author.
Amsterdam : Elsevier,        1 online resource 2018
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