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Microelectromechanical systems -- Materials.
    E-RESOURCE 2010

Handbook of silicon based MEMS materials and technologies / [electronic resource] / Veikko Lindroos ... [et al.].

Amsterdam ; Boston : William Andrew/Elsevier,    1st ed.    xxxii, 636 p. : ill. 2010
    E-RESOURCE 2010

MEMS materials and processes handbook / [electronic resource] / edited by Reza Ghodssi, Pinyen Lin.

New York ; London : Springer,        1 online resource. 2010
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