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Title Functional micro- and nanosystems : proceedings of the 4th caesarium, Bonn, June 16-18, 2003 / Karl-Heinz Hoffmann, editor.

Published Berlin : Springer, c2004.


Location Call No. Status
 UniM Store Engin  621.381 FUNC    AVAILABLE
Physical description viii, 131 p. : ill. (some col.) ; 24 cm.
Bibliography Includes bibliographical references.
Other author Hoffmann, K.-H. (Karl-Heinz)
Subject Microelectromechanical systems -- Congresses.
Microstructure -- Congresses.
Nanostructured materials -- Congresses.
ISBN 354021612X (hb)