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Title Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China / edited by Changhui Liu.

Published Zurich, Switzerland : TTP, 2014.


Location Call No. Status
Physical description 1 online resource (117 pages) : illustrations (some color), graphs, photographs.
Series Advanced Materials Research, 1662-8985 ; Volume 901
Advanced materials research ; Volume 901.
Bibliography Includes bibliographical references at the end of each chapters and indexes.
Notes Description based on online resource; title from PDF title page (ebrary, viewed March 20, 2014).
Local Note Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Other author Liu, Changhui, editor.
Subject Microelectromechanical systems -- Congresses.
Nanotechnology -- Congresses.
Electronic books.
ISBN 9783038350477
9783038264286 (e-book)