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SUBJECTS (1-2 of 2)
Semiconductors -- Etching -- Congresses.
1
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    PRINTED BOOKS 1992

Materials modification by energetic atoms and ions : Symposium held April 28-30, 1992, San Francisco, California, USA / editors, Kenneth S. Grabowski ... [and others].

    Materials Research Society. Fall Meeting (1992 : San Francisco, Calif.). Symposium.
Pittsburgh, PA : Materials Research Society,        xiii, 405 pages : illustrations ; 24 cm. 1992
2
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    E-RESOURCE 1997

Plasma processing of semiconductors / edited by P.F. Williams.

    NATO Advanced Study Institute on Plasma Processing of Semiconductors (1996 : Bonas, France)
Dordrecht ; Boston : Kluwer Academic Publishers,        1 online resource (x, 613 pages) : illustrations. 1997
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