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Cover Art
PRINTED BOOKS
Author Mahajan, Subhash.

Title Principles of growth and processing of semiconductors / S. Mahajan, K.S. Sree Harsha.

Published Boston : WCB/McGraw-Hill, [1999]
©1999

Copies

Location Call No. Status
 UniM Store Engin  621.38152 MAHA    AVAILABLE
Physical description xv, 512 pages : illustrations ; 25 cm.
Series McGraw-Hill series in materials science and engineering.
McGraw-Hill series in materials science and engineering.
Bibliography Includes bibliographical references and index.
Contents 1. Semiconductors: An Introduction -- 2. Principles of Semiconducting Devices -- 3. Defects -- 4. Evaluation of Semiconductors -- 5. Growth of Bulk Crystals -- 6. Expitaxial Growth -- 7. Oxidation -- 8. Diffusion -- 9. Ion Implantation -- 10. Metallization -- 11. Lithography and Etching -- 12. Challenges in Growth and Processing of Semiconductors.
Summary A senior/graduate text on the growth and processing of semiconductor materials (semiconductor fabrication) that will expose material/electrical and chemical engineering majors to the principles underlying the fabrication of state-of-the-art integrated circuits and their applications.
Other author SreeHarsha, K. S.
Subject Semiconductors -- Design and construction.
ISBN 0070396051 (alk. paper)