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Cover Art
Author Borisenko, V. E. (Viktor Evgenʹevich), author.

Title Rapid thermal processing of semiconductors / Victor E. Borisenko, Peter J. Hesketh.

Published New York : Springer Science+Business Media, LLC, [1997]


Location Call No. Status
Physical description 1 online resource (xxii, 358 pages) : illustrations.
Series Microdevices : physics and fabrication technologies
Notes Originally published by Plenum Press, New York in 1997.
"Softcover reprint of the hardcover 1st edition 1997"--Title page verso.
Bibliography Includes bibliographical references (pages 301-353) and index.
Contents Ch. 1. Transient Heating of Semiconductors by Radiation -- Ch. 2. Recrystallization of Implanted Layers and Impurity Behavior in Silicon Crystals -- Ch. 3. Crystallization, Impurity Diffusion, and Segregation in Polycrystalline Silicon -- Ch. 4. Component Evaporation, Defect Annealing, and Impurity Diffusion in the III-V Semiconductors -- Ch. 5. Diffusion Synthesis of Silicides in Thin-Film Metal-Silicon Structures -- Ch. 6. Rapid Thermal Oxidation and Nitridation -- Ch. 7. Rapid Thermal Chemical Vapor Deposition.
Summary Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
Notes Description based on online resource; title from PDF title page (SpringerLink, viewed August 14, 2014).
Other author Hesketh, P. J. (Peter J.), author.
Subject Semiconductors -- Design and construction.
Rapid thermal processing.
Semiconducteurs -- Traitement thermique.
Semiconducteurs -- Dopage.
Rapid thermal processing.
Thermische Verfahrenstechnik.
Rapid thermal processing.
Semiconductors -- Design and construction.
Electronic books.
ISBN 9781489918048 (electronic bk.)
1489918043 (electronic bk.)
Standard Number 10.1007/978-1-4899-1804-8