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Cover Art
Author Xiao, Hong.

Title Introduction to semiconductor technology [electronic resource] / Hong Xiao.

Published Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2012.


Location Call No. Status
Edition 2nd ed.
Physical description 1 online resource (xix, 656 p.) : ill., digital file.
Series SPIE Press monograph ; PM220
SPIE Press monograph ; PM220.
SPIE Digital Library.
Notes "SPIE Digital Library."--Website.
Bibliography Includes bibliographical references.
Contents Preface to the first edition -- Preface to the second edition -- Chapter 1. Introduction -- Chapter 2. Introduction to integrated circuit fabrication -- Chapter 3. Semiconductor basics -- Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering -- Chapter 5. Thermal processes -- Chapter 6. Photolithography -- Chapter 7. Plasma basics -- Chapter 8. Ion implantation -- Chapter 9. Etch -- Chapter 10. Chemical vapor deposition and dielectric thin films -- Chapter 11. Metallization -- Chapter 12. Chemical mechanical polishing -- Chapter 13. Process integration -- Chapter 14. Integrated circuit processing technologies -- Chapter 15. Future trends and summary.
Restrictions Restricted to subscribers or individual electronic text purchasers.
Summary Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations.
Other formats Also available in print version.
System notes Mode of access: World Wide Web.
System requirements: Adobe Acrobat Reader.
Notes Title from PDF title page (SPIE eBooks Website, viewed 2012-07-19).
Other author Society of Photo-optical Instrumentation Engineers.
Subject Integrated circuits -- Design and construction.
Semiconductors -- Design and construction.
Semiconductor industry.
Electronic books.
ISBN 9780819490933 (electronic)
9780819490926 (print)
Standard Number 10.1117/3.924283