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Cover Art
E-RESOURCE
Author Wong, Terence K. S.

Title Semiconductor strain metrology [electronic resource] : principles and applications / Terence K.S. Wong.

Published [Saif Zone, Sharjah, U.A.E] ; Oak Park, IL : Bentham Science, [2012]

Copies

Location Call No. Status
 UniM INTERNET resource    AVAILABLE
Physical description 136 p. : ill.
Bibliography Includes bibliographical references and index.
Reproduction Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Other author ProQuest (Firm)
Subject Semiconductors -- Design and construction -- Materials.
Compound semiconductors -- Design and construction -- Materials.
Silicon-on-insulator technology.
Electronic books.
ISBN 9781608053599