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Cover Art
Author Ma, Xu, 1983-

Title Computational lithography [electronic resource] / Xu Ma and Gonzalo R. Arce.

Published Oxford : Wiley-Blackwell, 2010.


Location Call No. Status
Physical description xv, 226 p. : ill.
Series Wiley series in pure and applied optics
Wiley series in pure and applied optics.
Bibliography Includes bibliographical references and index.
Reproduction Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Other author Arce, Gonzalo R.
ProQuest (Firm)
Subject Microlithography -- Mathematics.
Integrated circuits -- Design and construction -- Mathematics.
Photolithography -- Mathematics.
Semiconductors -- Etching -- Mathematics.
Resolution (Optics)
Electronic books.
ISBN 9780470596975