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PRINTED BOOKS

Title MEMS : a practical guide to design, analysis, and applications / edited by Jan G. Korvink and Oliver Paul.

Published Norwich, NY : W. Andrew Pub. ; Heidelberg Germany : Springer, [2006]
©2006

Copies

Location Call No. Status
 UniM ERC  621 MEMS    AVAILABLE
Physical description xxv, 965 pages : illustrations ; 24 cm
polychrome rdacc
Notes "Micro-electro-mechanical systems"--Cover.
Bibliography Includes bibliographical references and index.
Contents 1 Microtransducer Operation / Oliver Paul 1 -- 1.2 Transduction 2 -- 1.3 Microsystem Performance 13 -- 1.4 Transducer Operation Techniques 26 -- 1.5 Powering Microsystems 44 -- 2 Material Properties: Measurement and Data / Osamu Tabata, Toshiyuki Tsuchiya 53 -- 2.2 Measurement Methods 55 -- 2.3 Data 74 -- 3 MEMS and NEMS Simulation / Jan G. Korvink, Evgenii B. Rudnyi, Andreas Greiner, Zhenyu Liu 93 -- 3.2 Simulation Scenario 93 -- 3.3 Generic Organization of a Computational Tool 101 -- 3.4 Methods for Materials Simulation 111 -- 3.5 Computational Methods that Solve PDEs 122 -- 3.6 Design Automation Methods 138 -- 4 System-Level Simulation of Microsystems / Gary K. Fedder 187 -- 4.2 Behavioral Modeling of MEMS Components 193 -- 4.3 Formulation of Equations of Motion 209 -- 4.4 Structured Design Tools 215 -- 5 Thermal-Based Microsensors / Friedemann Voelklein 229 -- 5.2 Thermoresistors 230 -- 5.3 Silicon Diodes and Transistors as Thermal Microsensors 240 -- 5.4 Thermoelectric Microsensors 243 -- 5.5 CMOS-Compatible Thermal-Based Microsensors and Microactuators 266 -- 5.6 Diagnostic Thermal-Based Microstructures 273 -- 6 Photon Detectors / Arokia Nathan, Karim S. Karim 281 -- 6.2 Detectors 284 -- 6.3 Thin-Film Transistors 296 -- 6.4 Pixel Integration 308 -- 6.5 Imaging Arrays 314 -- 6.6 New Challenges in Large-Area Digital Imaging 334 -- 7 Free-Space Optical MEMS / Ming C. Wu, Pamela R. Patterson 345 -- 7.2 General Discussion of Micromirror Scanners 346 -- 7.3 Electrostatic Scanners 349 -- 7.4 Scanning Mirrors with Magnetic and Electromagnetic Actuators 361 -- 7.5 Micromirror Arrays with Mirror Size [less than or equal] 100 Micrometers 364 -- 7.6 2-D MEMS Optical Switches 370 -- 7.7 2 x 2 Switches 383 -- 7.8 Optical Attenuator Array 386 -- 7.9 Tunable WDM Devices 388 -- 7.10 Diffractive Optical MEMS 390 -- 8 Integrated Micro-Optics / Hans Zappe 403 -- 8.2 Guided Waves 405 -- 8.3 Stripe Waveguides 421 -- 8.4 Input/Output Coupling 429 -- 8.5 Waveguide Characterization 434 -- 8.6 Integrated Optical Devices 438 -- 8.7 Materials 445 -- 8.8 Applications 448 -- 9 Microsensors for Magnetic Fields / Chavdar Roumenin 453 -- 9.2 Magnetic Fields for Different Applications 453 -- 9.3 Main Figures of Merit of Magnetic Microsensors 457 -- 9.4 Hall Microsensors 463 -- 9.5 Magnetoresistors 478 -- 9.6 Magnetodiodes 484 -- 9.7 Magnetotransistors and Related Microsensors 488 -- 9.8 Magnetic Field-based Functional Multisensors 495 -- 9.9 Interfaces and Improvement of Characteristics of Magnetic Microsensors 502 -- 10 Mechanical Microsensors / Franz Laermer 523 -- 10.2 Inertial Sensors 527 -- 10.3 Pressure Sensors 550 -- 10.4 Force and Torque Sensors 560 -- 11 Semiconductor-Based Chemical Microsensors / Andreas Hierlemann, Henry Baltes 567 -- 11.2 Thermodynamics of Chemical Sensing 574 -- 11.3 Chemomechanical Sensors 580 -- 11.4 Thermal Sensors 591 -- 11.5 Optical Sensors 598 -- 11.6 Electrochemical Sensors 615 -- 12 Microfluidics / Jens Ducree, Peter Koltay, Roland Zengerle 667 -- 12.2 Properties of Fluids 670 -- 12.3 Physics of Microfluidic Systems 678 -- 12.4 Fabrication Technologies 689 -- 12.5 Flow Control 696 -- 12.6 Micropumps 702 -- 12.7 Sensors 703 -- 12.8 Pipettes and Dispensers 707 -- 12.9 Microarrays 709 -- 12.10 Microreactors 713 -- 12.11 Microanalytical Chips 715 -- 13 Biomedical Systems / Whye-Kei Lye, Michael Reed 729 -- 13.2 Materials and Fabrication Techniques 730 -- 13.3 Surgical Systems 735 -- 13.4 Tissue Repair 739 -- 13.5 Therapeutic Systems 742 -- 14 Microactuators / Jack W. Judy 751 -- 14.2 Actuators: Transducers with Mechanical Output 752 -- 14.3 Electrostatic Forces 755 -- 14.4 Electrostatic Microactuator Configurations 765 -- 14.5 Piezoelectric Microactuators 787 -- 14.6 Electrostriction, Electrets, and Electrorheological Fluids 797 -- 15 Micromachining Technology / Paddy J. French, Pasqualina M. Sarro 805 -- 15.2 Bulk Micromachining 805 -- 15.3 Surface Micromachining 824 -- 15.4 Epi-Micromachining 829 -- 15.5 IC Compatibility Issues 837 -- 16 LIGA Technology for R&D and Industrial Applications / Ulrike Wallrabe, Volker Saile 853 -- 16.2 LIGA Process 854 -- 16.3 Application in Modular Micro-Optical Systems 867 -- 16.4 Mechanical Applications 885 -- 16.5 Outlook 895 -- 17 Interface Circuitry and Microsystems / Piero Malcovati, Franco Maloberti 901 -- 17.2 Microsensor Systems 902 -- 17.3 Microsensor System Applications 905 -- 17.4 Interface Circuit Architecture 909 -- 17.5 Analog Front-End 912 -- 17.6 A/D Converter 921 -- 17.7 Digital Processing and Output Interface 931.
Other formats Also available online via the World Wide Web, by subscription to Knovel.
Reproduction Electronic reproduction. Norwich, N.Y : Knovel Library, c2006. Mode of access: World Wide Web. System requirements: Adobe Acrobat Reader. Title from PDF title page (viewed on May 24, 2006). Access restricted to users at licensed institutions.
Other author Korvink, J. G. (Jan G.)
Paul, Oliver.
Knovel (Firm)
Subject Microelectromechanical systems.
Electronic books.
ISBN 0815514972 (hbk. : alk. paper)